Finishing of Advanced Ceramics

Abstract

This project deals with both fundamental and applied aspects of finishing of advanced ceramics, such as silicon nitride (Si3N4) balls for hybrid bearing applications using the magnetic float polishing (MFP) technology developed under DARPA's Ceramic Bearing Technology Program (CF 33615-92-C-5933). On the fundamental side, an understanding of the material removal mechanisms involving both mechanical and chemo-mechanical polishing (CMP) as well as thermal aspects of polishing were considered. improvements in the quality of the finished balls in terms of surface finish (Ra 5 nm) and sphericity (0.15-0.25 mm) and the development of prototype equipment for increasing the batch size by almost an order of magnitude (i.e. from about 10 balls of 12 mm diameter per batch with the small apparatus to about 80 balls per batch with a large apparatus) for polishing were investigated on the technology side. The processing time for finishing a batch of balls was about 20 hours.

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Document Details

Document Type
Technical Report
Publication Date
Oct 30, 2000
Accession Number
ADA384285

Entities

People

  • Ranga Komanduri

Organizations

  • Oklahoma State University–Stillwater

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Aluminum Oxides
  • Ceramic Materials
  • Chemical Synthesis
  • Chemistry
  • Combinatorial Analysis
  • Equations Of State
  • Heat Transfer
  • Isotherms
  • Magnetic Materials
  • Material Degradation Processes
  • Materials
  • Materials Science
  • Mechanics
  • Modulus Of Elasticity
  • Technical Ceramics
  • Thermodynamics
  • Two Dimensional

Readers

  • Integrated Circuit Design and Technology.
  • Surface Coatings Technology.
  • Tribology (the study of the boundary interaction between sliding surfaces, lubrication, wear and friction).