A Process for 94-GHz Schottky-Diode-Based Phase-Shifter MMICs

Abstract

This report describes the first working monolithic microwave integrated circuit (MMIC) process produced at the Army Research Laboratory and the University of Maryland's Laboratory for Physical Sciences. This report describes a process that was used to produce 94-GHz phase shifters with 3570 phase shift and a loss of -7.7dB at 10 V.

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Document Details

Document Type
Technical Report
Publication Date
Nov 01, 2000
Accession Number
ADA384678

Entities

People

  • Warren Berk

Organizations

  • United States Army Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Chemical Vapor Deposition
  • Electroplating
  • Films
  • Integrated Circuits
  • Jet Propulsion
  • Materials
  • Metal-Semiconductor Junctions
  • Microwave Integrated Circuits
  • Military Research
  • Monolithic Microwave Integrated Circuits
  • Phase Shift
  • Phased Array Radar
  • Phased Arrays
  • Resistance
  • Schottky Diodes
  • Sputtering
  • Thin Films

Readers

  • Integrated Circuit Design and Technology.
  • Phased Array Antenna Design.
  • Technical Research and Report Writing.