In Situ Absolute Temperature Control of Growing Thin Films of the Complex Oxides

Abstract

The Fourier Transform Infrared spectrophotometer purchased from Online Technologies, Inc. was tested and declared operational with the help of the designer from that company. Bench top tests of the sensitivity of the temperature measurement to spectral reflection and angle of acceptance were performed. Design and structural modifications were made to the electron beam evaporator in which it will be used. These are necessary to accommodate the special requirements of the instrument.

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Document Details

Document Type
Technical Report
Publication Date
Nov 28, 2000
Accession Number
ADA386605

Entities

People

  • Malcolm Beasley
  • Mónica Kelly
  • P. Rosenthal
  • R. H. Hammond

Organizations

  • Stanford University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Advanced Materials
  • Electron Beams
  • Electrons
  • Evaporators
  • Films
  • High Temperature
  • High Temperature Superconductors
  • Infrared Spectrophotometers
  • Materials
  • Measurement
  • Reflection
  • Sensitivity
  • Spectrophotometers
  • Temperature Control
  • Test Methods
  • Thin Films

Fields of Study

  • Physics

Readers

  • Aerospace Test and Evaluation
  • Spectroscopy.
  • Thin Film Deposition Science.

Technology Areas

  • Directed Energy
  • Directed Energy - Pulsed-Laser Deposition
  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems