Si Based Nanostructure Growth Subsystem with Atomic Scale Control. Supersonic Molecular Beam Array Cell
Abstract
The Following Equipment was Purchased: KSA 400 Computer System, Si Molecular Beam Epitaxy System, and Compact Modular Plasma System. This equipment was used to perform research in an effort to determine the mechanism of facet growth occuring in selective epitaxial growth and to produce Si based nanostructures using a supersonic molecular beam.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 31, 1998
- Accession Number
- ADA386792
Entities
People
- Kang L. Wang
Organizations
- University of California, Los Angeles