Experimental Studies of Microdischarge Device and Arrays

Abstract

Arrays of microdischarge devices fabricated in Si have been improved in performance by utilizing VLSI fabrication technology and grading the dielectric. Also, a microdischarge device was fabricated in a multilayer ceramic structure in collaboration with colleagues at Motorola in Phoenix, AZ. Overall, this grant was crucial in supporting fundamental processing work to be carried out that has shown us how to proceed with constructing smaller devices.

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Document Details

Document Type
Technical Report
Publication Date
Aug 31, 2000
Accession Number
ADA389226

Entities

People

  • James Gary Eden

Organizations

  • University of Illinois Urbana–Champaign

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Abstracts
  • Air Force
  • Classification
  • Dielectric Films
  • Dielectric Polymers
  • Engineering
  • Fabrication
  • Illinois
  • Microelectronics
  • Scientific Research
  • Security
  • Standards
  • Teamwork
  • Universities
  • Visible Spectra

Readers

  • Academic Conference Management
  • Integrated Circuit Design and Technology.
  • Systems Analysis and Design