AAMU Materials Research Science and Engineering Center
Abstract
The instrumentation funds of this grant were used to upgrade an NEC 5SDH-2 high energy implanter with an upgraded gas stripper chamber, insulating gas transfer system, and residual gas analyzer. These upgrades improve ion beam current, reduce repair and maintenance costs and downtime. The Eaton low energy implanter was provided with new vacuum pumps to replace irreparable pumps. This implanter will allow materials modification by low energy, high current ion beams at AAMU, rather than at other facilities. Funds were also use to acquire a micro-Raman spectrometer (DILOR LabRam) and an optical spectrophotometer (Spectral Instruments). These instruments analyze materials modified by ion beams, created by in-house deposition systems or provided by customers. Funds were also expended to purchase a guass meter probe for the ion selection magnet on the high energy implanter and a near infrared viewer for use in analyzing ion beam modified channel waveguides.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 01, 2000
- Accession Number
- ADA389365
Entities
People
- D. Ila