Demonstration of Robust Micromachined Jet Technology and its Application to Realistic Flow Control Problems

Abstract

In this work, we are investigating the use of microfabrication technology to create a micromachined fluidic control system (consisting of micromachined actuators, sensors, and control/drive circuitry) with a goal of application in practical fluids problems, such as UAV-scale aerodynamic control. Our approaches include: (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems.

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Document Details

Document Type
Technical Report
Publication Date
Sep 30, 2000
Accession Number
ADA389615

Entities

People

  • Ari Glezer
  • Mark G. Allen

Organizations

  • Georgia Tech

Tags

Communities of Interest

  • Sensors

DTIC Thesaurus Topics

  • Actuators
  • Air Force
  • Cross Flow
  • Demonstrations
  • Electrical Engineering
  • Electronics
  • Engineering
  • Fabrication
  • Flow
  • Hypervelocity Flow
  • Machining
  • Manufacturing
  • Materials
  • Mechanical Engineering
  • Microelectromechanical Systems
  • Microelectronics
  • Micromachining

Readers

  • Combustion and Flow Dynamics.
  • Integrated Circuit Design and Technology.
  • Robotics and Automation.