Optical Readout of MEMS. 1999 IRIS Materials Meeting Held on 16-19 August 1999

Abstract

Over the past decade the field of micro-electro-mechanical systems (MEMS) has attracted increased interest. Miniaturization of mechanical systems promise new directions in the progress of science and technology.

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Document Details

Document Type
Technical Report
Publication Date
Aug 19, 1999
Accession Number
ADA390065

Entities

People

  • P. G. Datskos

Organizations

  • University of Tennessee system

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Abstracts
  • Charge Carriers
  • Deflection
  • Detection
  • Detectors
  • Dynamic Range
  • Fabrication
  • Fresnel Zones
  • Interferometry
  • Materials
  • Microelectromechanical Systems
  • Microstructure
  • Modulus Of Elasticity
  • Optical Fibers
  • Quantum Yields
  • Semiconductors
  • Software Prototyping

Fields of Study

  • Chemistry
  • Physics

Readers

  • Economics
  • Integrated Circuit Design and Technology.
  • Technical Research and Report Writing.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems