High-Quality LGS-Type Crystals and Films for Surface Acoustic Wave Applications

Abstract

The aim of this project was to investigate the feasibility of liquid phase epitaxy (LPE) for the growth of high-quality langasite-type films for high-frequency RF resonator applications. The work done during this period included phase diagram studies, the search for a suitable solvent, systematic flux growth experiments of LGS, LGN and LGT, X-ray analysis of crystallized phases, preparation (orientation, sawing, polishing, etching) of LGS and LGT substrates from provided bulk Czochralski-grown crystals, top-seeded solution growth (TSSG) and LPE experiments. LPE films of LGS up to 1 x 1 sq cm could be grown on X- and Y-cut (YZ, XZ in-plane axis, respectively) LGS substrates for the first time. The clear tendency to step/facet formation observed on Y-LGS films indicates that this plane (at least) may evoluate to the equilibrium facet, e.g.; a perfectly oriented and flat surface, which is very interesting in view of SAW & BAW applications.

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Document Details

Document Type
Technical Report
Publication Date
Dec 18, 2000
Accession Number
ADA390243

Entities

People

  • Christine Klemenz

Organizations

  • Institute of Microelectronics

Tags

Communities of Interest

  • Air Platforms

DTIC Thesaurus Topics

  • Acoustic Waves
  • Crystal Growth
  • Crystallization
  • Crystals
  • Diagrams
  • Epitaxial Growth
  • Liquid Phase Epitaxy
  • Liquid Phases
  • Liquids
  • Materials
  • Phase
  • Phase Diagrams
  • Piezoelectric Crystals
  • Piezoelectric Materials
  • Surface Acoustic Waves
  • Transition Temperature
  • Transitions

Readers

  • Cellular and Molecular Pathways of Apoptosis.
  • Materials Science and Engineering.
  • Microwave Engineering.