A Multidisciplinary Research Proposal for MEMS-Based Smart Gas Turbine Engines

Abstract

The objective of this program is to develop sensor and actuator array technologies based on microelectromechanical systems (MEMS) for distributed measurement and actuation in harsh environments. Currently MEMS devices are fabricated primarily from silicon, which limits application areas to temperatures below 25 deg C. We are developing silicon carbide (SiC) as a material for MEMS in harsh temperature, corrosive, and erosive environments. To this end, we have focussed a major part of this program on the development of materials and processing techniques required to fabricate SiC-based MEMS structures. This document serves as the final progress report for this program.

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Document Details

Document Type
Technical Report
Publication Date
Sep 15, 2000
Accession Number
ADA390951

Entities

People

  • Mehran Mehregany
  • Roberto Ballarini
  • Russel G. Deanna
  • Stephan M. Phillips
  • Steven L. Garverick

Organizations

  • Case Western Reserve University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Advanced Materials
  • Ceramic Materials
  • Computer Science
  • Electrical Engineering
  • Electronics
  • Fabrication
  • Gas Turbines
  • Materials
  • Mechanical Properties
  • Microelectromechanical Systems
  • Micromachining
  • Microstructure
  • Modulus Of Elasticity
  • Semiconductors
  • Signal Processing
  • Silicon Carbide
  • Turbines

Readers

  • Integrated Circuit Design and Technology.
  • Semiconductor Device Technology
  • Technical Research and Report Writing.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems