Fundamentals of Metal Film Deposition With Hyperthermal Ions

Abstract

Our accomplishments for the period of 15 December 97 - 14 December 00 can be summarized in five key areas. They are: (A) Morphology evolution of ion-irradiated Au(III); (B) Thermal relaxation of a sputter-roughened surface; (C) Energetic deposition of Cu on Cu(III); (D) Monte Carlo and Molecular Dynamics simulations of mound formation, thermal relaxation, and energetic deposition; and (E) Hardware development for studies of energetic deposition with controlled energy beams.

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Document Details

Document Type
Technical Report
Publication Date
Dec 14, 2000
Accession Number
ADA391536

Entities

People

  • Barbara H. Cooper

Organizations

  • Cornell Laboratory of Atomic and Solid State Physics

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Detectors
  • Diffraction
  • Dynamics
  • Epitaxial Growth
  • Films
  • Materials
  • Materials Processing
  • Materials Science
  • Measurement
  • Molecular Dynamics
  • Physics
  • Scattering
  • Simulations
  • Solid State Physics
  • Three Dimensional
  • Transitions
  • Two Dimensional

Readers

  • Molecular Photonics/Laser Physics
  • Thin Film Deposition Science.