Langmuir Probe Measurement Techniques and Data Analysis for LAPPS

Abstract

Langmuir probe diagnostics have been applied to an inductively coupled test discharge as part of the diagnostics development effort for the Large Area Plasma Processing System at NRL. The method of calculating electron energy from the EEDF derived from the probe second derivative is compared with more traditional methods of fitting the probe characteristics to a known function assuming a Maxwellian distribution. It is shown that under some circumstances the local plasma around the probe can be perturbed such that fewer electrons are sourced to the probe than theory would predict for a non-perturbing diagnostic, resulting in a higher average electron energy.

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Document Details

Document Type
Technical Report
Publication Date
Jun 11, 2001
Accession Number
ADA391704

Entities

People

  • D. D. Blackwell
  • D. Leonhardt
  • Richard F. Fernsler
  • Scott G. Walton

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Base Pressure
  • Blood
  • Charged Particles
  • Circuits
  • Data Acquisition
  • Data Analysis
  • Distribution Functions
  • Electron Energy
  • Electronic Equipment
  • Electrons
  • Energy
  • Fittings
  • Langmuir Probes
  • Measurement
  • Military Research
  • Particle Physics
  • Power Supplies

Fields of Study

  • Physics

Readers

  • Fluid Dynamics.
  • Plasma Physics / Magnetohydrodynamics
  • Pulsed Power and Plasma Physics.

Technology Areas

  • Microelectronics