In Situ Measurement of Growing Thin Films by Energy Dispersive X-Ray Reflectivity: Theory and Experimental Design

Abstract

A method for the in-situ measurement of thin-film growth by x-ray reflectivity is described. Description of the underlying theory is given. Real-time characterization of thickness and roughness variation during growth is possible via this technique. A deposition chamber for the implementation of these measurements has been designed and constructed. This apparatus is described, along with software developed for the purpose of data acquisition and analysis.

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Document Details

Document Type
Technical Report
Publication Date
Jul 01, 2001
Accession Number
ADA392891

Entities

People

  • Donald Windover
  • Jason Summers
  • Sabrina Lee
  • Toh-ming Lu

Organizations

  • United States Army Armament Research, Development and Engineering Center

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies
  • Weapons Technologies

DTIC Thesaurus Topics

  • Acquisition
  • Data Acquisition
  • Data Analysis
  • Detectors
  • Experimental Design
  • Films
  • Geometry
  • Materials
  • Measurement
  • Reflectivity
  • Refractive Index
  • Roughness
  • Scattering
  • Thickness
  • Thin Films
  • X Rays
  • X-Ray Reflectometry

Fields of Study

  • Physics

Readers

  • Artificial Intelligence
  • Thin Film Deposition Science.