10 Gbyte Personal Multimedia MEMS ROM Data Storage Card

Abstract

The goal of this project was to create a two-chip MEMS read-only memory data storage device using single-crystal silicon based actuators. The read head of the ROM is composed of a parallel array of atomic force microscope tips each mounted on a small element size torsional cantilever. An xy microstage containing the data bits is mounted beneath the tips and actuated or scanned, analogous to the rotating magnetic disk for conventional drives. The number of interconnects required for the large displacement stage is minimized, reducing the level of complexity required in the fabrication. Control electronics are needed to drive the stage, sample the small deflections of the torsional cantilever, and buffer the data from the individual probes. The first full storage systems based on MEMS silicon actuators were fabricated, assembled, and tested.

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Document Details

Document Type
Technical Report
Publication Date
Jun 01, 2001
Accession Number
ADA393035

Entities

People

  • Timothy J. Davis

Tags

DTIC Thesaurus Topics

  • Actuators
  • Air Force
  • Air Force Research Laboratories
  • Assembly
  • Coding
  • Data Storage Systems
  • Deflection
  • Detection
  • Detectors
  • Electronics
  • Fabrication
  • Information Systems
  • Integrated Circuits
  • Microelectromechanical Systems
  • Microscopes
  • Resonant Frequency
  • Two Dimensional

Fields of Study

  • Physics

Readers

  • Computer Science/Computer Engineering/Data Science/Digital Signal Processing.
  • Integrated Circuit Design and Technology.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems