Microelectromagnetic Systems (MEMS) Electrostatic Switching Technology for Microwave Systems

Abstract

The development of microelectromechanical Systems (MEMS) switch technology and integration of this technology into radio frequency (RF) electronics has created numerous applications for both commercial and military systems. The incorporation of RF MEMS switches into microwave systems offers unprecedented reductions in insertion loss (on-resistance) with extremely low switching power levels as compared with active devices such as field effect transistors (FETs) and positive-intrinsic-negative (PIN) diodes. Achievement of these performance improvements creates new opportunities for radar systems. The overall objective of this research was the design, fabrication, and characterization of MEMS switches fabricated on gallium arsenide substrates with possible application into microwave systems.

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 2000
Accession Number
ADA393371

Entities

People

  • Richard E. Strawser

Organizations

  • Air Force Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Chemical Vapor Deposition
  • Dielectric Permittivity
  • Dielectrics
  • Electronics
  • Electronics Laboratories
  • Fabrication
  • Field Effect Transistors
  • Materials
  • Measurement
  • Mechanics
  • Microelectromechanical Systems
  • Modules (Electronics)
  • Modulus Of Elasticity
  • Radar
  • Semiconductor Devices
  • Semiconductors
  • Three Dimensional

Readers

  • Integrated Circuit Design and Technology.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems