4TH International Workshop. Microwave Discharges: Fundamentals and Applications
Abstract
The Final Proceedings for Fourth International Workshop on Microwave Discharges: Fundamental and Applications, 18 September 2000 - 22 September 2000. This is an interdisciplinary conference. Topics include: Methods of microwave plasma generation; High and low pressure microwave discharges; Continuous wave and pulsed microwave discharges; Interaction of microwaves with a plasma; Discharge modeling and diagnostics; Applications of microwave plasma (surface treatment etching, film deposition, growth of structures, light sources, analytical chemistry, etc.); and selected topics of closely-related gas discharges problems.
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 01, 2000
- Accession Number
- ADA393433