MEMS Direct View Infrared Vision System (DVIR)

Abstract

Sarnoff has fabricated 16 x 16 pixel arrays of gated field emitters in which the gate plates are MEMS structures actuated by infrared radiation in the 8 - 12 micro regime. The actuators consist of 250 micro SiC, 20 nm TiW, and 300 nm Au.

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Document Details

Document Type
Technical Report
Publication Date
Jun 01, 2001
Accession Number
ADA393654

Entities

People

  • Heinz H. Busta

Organizations

  • Sarnoff Corporation

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Air Force Research Laboratories
  • Ceramic Materials
  • Chemistry
  • Emission
  • Emitters
  • Engineering
  • Fabrication
  • Field Emission
  • Geometry
  • Information Systems
  • Manufacturing
  • Materials Processing
  • Measurement
  • Microelectromechanical Systems
  • Radiation
  • Silicon Carbide
  • Thermal Resistance

Fields of Study

  • Physics

Readers

  • Atmospheric Remote Sensing.
  • Integrated Circuit Design and Technology.
  • Nanofabrication and Microfabrication.