Generation of Reduced Parametric Models of Microdevices from High Fidelity Tools for System Level Composite Computer-Aided Design (CAD)
Abstract
Microelectromechanical Systems (MEMS), also Known as microsystems, consist of interconnected arrays of mechanical, electrostatic, thermal, structural, optical, fluidic, magnetic, and electronic components. Individual components can be simulated using multi-dimensional high fidelity computational tools based on first principles and Partial Differential Equations. For system level design, where large numbers of devices are interconnected, use of detailed 3-D models of each component is unrealistic. A more practical approach is to develop simplified but accurate sub models. A software system for the automated generation of reduced or compact models of microdevices from high fidelity 3-D simulations was developed, demonstrated, and validated. During this effort: fluidic, electromechanical, and thermal phenomena were examined; new concepts for reduced models were pursued; the burden of generating 3-D models from Electronic Design Automation (EDA) layouts and process data was eased; and procedures to exploit interface and import/export CAD/EDA standards were defined. Results of this effort were incorporated into CFD Research Corporation's commercial Computer-Aided Design (CAD) tool suite along with Carnegie Mellon University's NODAS system-level CAD tool. The results of this effort have been applied to a variety of real problems of interest to both the defense industry and commercial Market.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 01, 2001
- Accession Number
- ADA394960
Entities
People
- Andrzej Pzekwas
- Enchao Yu
- Marek Turowski
- Zhijan Chen
- Zhiqiang Tan