DURIP 00 Electron Backscatter Diffraction (EBSD) System for Crystallographic Imaging in a SEM
Abstract
The Electron Backscatter Diffraction (EBSD) System was purchased and installed. Training is currently ongoing and the technique is being used to probe a variety of research problems including work support by our AFOSR/DARPA ferroelectric project. Imaging using EBSD is a relatively new, powerful, and elegant characterization technique for measuring micro- to mesostructural crystallography. As part of a SEM system, EBSD involves indexing the Kikuchi patterns formed by electrons backscattered from the sample. Through computer automation, the electron beam is slowly rastered over the sample as the pattern from each spot is analyzed. The result is an image of the microstructure based on crystallographic orientation. It should be noted that this capability has only been commercialized since 1993. EBSD provides sample resolution fine enough to crystallographically index individual grains, while offering a field of view large enough and data processing fast enough to provide statistically significant measurements of texture on either a localized or global basis. This coupling of fine resolution and relatively wide field of view makes it possible to analyze textures in virtually any type of sample from semiconductors, piezoelectrics, geological rocks, etc.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 28, 2001
- Accession Number
- ADA395128
Entities
People
- Gary L. Messing
Organizations
- Pennsylvania State University