Monolithic Three-Dimensional Micromachined Transmission Lines and Antennas

Abstract

Highly-coupled couplers (3-dB and 6-dB) are necessary for a wide range of millimeter-wave coplanar circuits. The high line-to-line capacitance required for these couplers is impossible to achieve with thin-film planar coupled lines. Using 80 microns-thick conductors patterned using a 3-D x-ray micromachining technique, we have successfully demonstrated a 15 GHz 6-dB coupler and a single-section coupled-line BPF that utilizes a 3-dB coupler geometry.

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Document Details

Document Type
Technical Report
Publication Date
Nov 09, 2001
Accession Number
ADA398489

Entities

People

  • Steven Gearhart

Organizations

  • University of Wisconsin–Madison

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Bandpass Filters
  • Capacitance
  • Circuits
  • Fabrication
  • Films
  • Frequency
  • Geometry
  • Materials
  • Micromachining
  • Millimeter Waves
  • Particle Accelerators
  • Radiation
  • Thin Films
  • Three Dimensional
  • Transmission Lines
  • X Ray Lithography
  • X Rays

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Microwave Engineering.

Technology Areas

  • 5G