Antenna-Coupled Uncooled Infrared Focal Plane Arrays: In-house Fabrication

Abstract

Under the support of the subject DURIP grant, University of Central Florida CREOL has developed an in-house capability for direct-write electron-beam fabrication of the microantenna coupled infrared sensors being investigated for contract to BMDO. The facility developed has resulted in shorter turn-around times for exploration of new device designs while giving a greater degree of process control. Establishment of this facility at CREOL has provided a cost-effective means for prototype device development for infrared focal-plane array applications.

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Document Details

Document Type
Technical Report
Publication Date
Feb 26, 2002
Accession Number
ADA399579

Entities

People

  • Glenn Boreman

Organizations

  • University of Central Florida

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors

DTIC Thesaurus Topics

  • Antennas
  • Arrays
  • Contracts
  • Detectors
  • Electron Beam Lithography
  • Electron Beams
  • Electron Microscopes
  • Electrons
  • Fabrication
  • Focal Plane Arrays
  • Focal Planes
  • Infrared Detectors
  • Scanning Electron Microscopes
  • Universities

Readers

  • Image Processing and Computer Vision.
  • Integrated Circuit Design and Technology.
  • Research Science/Academic Research

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Microelectromechanical Systems