System for Fabricating Thin Film Magnetic Microstructures
Abstract
An Ultra High Vacuum (UHV) system was reconditioned and improved in order to use it to develop high quality and well characterized magnetic films. This involved upgrading and repairing instrumentation used in both thin film growth and characterization. Most importantly, a sensitive flux sensor to monitor film growth was developed and calibrated. Descriptions of the upgrades, calibration process, and the calibration data are presented here.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 2001
- Accession Number
- ADA401753
Entities
People
- Todd C. Monson
Organizations
- Air Force Institute of Technology