Integrated Microelectromechanical Process and Circuit Technology
Abstract
Duke University in partnership with Carnegie Mellon University and the MCNC MEMS Technology Applications Center has performed a research effort to develop new technologies in the area of integrated microelectromechanical systems (MEMS). The research in Integrated Microelectromechanical Process and Circuit Technology (IMPACT) was organized and structured to promote key advancements in MEMS that leveraged state-of-the-art technologies. The goals of the program were based on the need to decouple circuit and process design activities, and thereby promote a common 'front-end' to MEMS design tools, as has been done in the integrated circuit arena. Specifically, the goal of IMPACT was to develop a circuit-level design capture and optimization tool set for MEMS technology having a beneficial impact comparable to that of physical-level schematic capture and layout tools developed for IC technology.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 01, 2002
- Accession Number
- ADA402475
Entities
People
- Richard Fair
Organizations
- Duke University