A Review of Some Current Research in Microelectromechanical Systems (MEMS) with Defence Applications

Abstract

This report reviews some research in microelectromechanical systems (MEMS) published during the period 1999 - 2000. Research in defence applications of MEMS or MEMS research with potential applications for the Australian Defence Organisation are also discussed.

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Document Details

Document Type
Technical Report
Publication Date
Feb 01, 2002
Accession Number
ADA402614

Entities

People

  • A. White

Organizations

  • Defence Science and Technology Group

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors
  • Space
  • Weapons Technologies

DTIC Thesaurus Topics

  • Aircraft Equipment
  • Aircrafts
  • Ceramic Materials
  • Chemistry
  • Control Systems
  • Detection
  • Detectors
  • Manufacturing
  • Materials Laboratories
  • Materials Processing
  • Materials Science
  • Measurement
  • Micro-Machines
  • Microelectromechanical Systems
  • Micromachining
  • Sensor Networks
  • Warning Systems

Readers

  • Defense Technology Research and Development.
  • Integrated Circuit Design and Technology.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems