AASERT-ISNP. Micro-Electro-Mechanical Systems (MEMS) Research for Intelligent Sensor Network and Smart Structures

Abstract

Under the AASERT-ISAS project, the Center for Engineering Design sought to refine processing techniques associated with cylindrical microfabrication and use these processes to assemble a functional microelectrode fabricated on a cylindrical substrate. Processes such as small feature patterning, passivation layer application, and connection methods were investigated.

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Document Details

Document Type
Technical Report
Publication Date
Jun 28, 2002
Accession Number
ADA403588

Entities

Organizations

  • University of Utah

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Electrical Circuits
  • Electrodes
  • Engineering
  • Environment
  • Helium Cadmium Lasers
  • Information Operations
  • Lasers
  • Lead Wires
  • Materials
  • Micro-Machines
  • Microelectrodes
  • Microelectromechanical Systems
  • Microfabrication
  • Microstructure
  • Military Research
  • Optics
  • Wire

Readers

  • Integrated Circuit Design and Technology.
  • Nanofabrication and Microfabrication.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems