Evolution of Surface Structures in Sputtered Coatings
Abstract
The evolving surface structure of sputtered tantalum and niobium coatings was characterized in terms of dynamic scaling exponents using atomic force microscopy (AFM) to map surface structures over a range of scales from 10-nm to 5-nm. New numerical techniques are introduced to systematically determine the time evolution of the spatial scaling parameters associated with the coating surface morphology. These dynamic scaling parameters define a unique universality class that is associated with the deposition process, and provides insight into the dynamics of the growth processes of thick metal films.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 01, 2002
- Accession Number
- ADA405463
Entities
People
- Mark A. Johnson
- Paul J. Cote
Organizations
- United States Army Armament Research, Development and Engineering Center