Microelectromechanical Systems (MEMS)-Based Microcapillary Pumped Loop for Chip-Level Temperature Control

Abstract

Utilizing current microelectromechanical systems (MEMS) technologies, a three-port microcapillary pumped loop (micro-CPL) was designed, fabricated, and tested to provide integral cooling to electronics of MEMS-type devices. The two-wafer design consists of one silicon and one borofloat glass wafer. An analytical study, adopted from traditional CLP theory, was used in determining the geometry of the device, including the evaporator dimensions (1000 by 2000 micrometers) and the length of the liquid and vapor lines (35 mm). Using laser spot heating, the finished device was run near steady state. The micro-CPL resulted in a backside cooling effect of a least 7 K when a laser delivering 7.5 W (+/- 0.2 W) with a spot-Size diameter of 1.0 mm was focused on the front side of the evaporator region.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2002
Accession Number
ADA405777

Entities

People

  • Jeffrey A. Kirshberg

Organizations

  • University of California, Berkeley

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Air Force Research Laboratories
  • Computational Fluid Dynamics
  • Fabrication
  • Fluid Dynamics
  • Geometry
  • Heat Energy
  • Heat Transfer
  • Laser Spots
  • Latent Heat
  • Materials
  • Microelectromechanical Systems
  • Numerical Analysis
  • Self Assembled Monolayers
  • Steady State
  • Temperature Control
  • Thermal Conductivity
  • Two Dimensional

Fields of Study

  • Engineering
  • Physics

Readers

  • Combustion and Flow Dynamics.
  • Integrated Circuit Design and Technology.
  • Optical Fiber Sensing and Electromagnetic Propagation.

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Microelectromechanical Systems