Reactions of Energetic Ions with Thin Film Surfaces

Abstract

The PI has designed and constructed a multi function vacuum chamber for evaporating metal films and depositing insulating layers. The chamber is to be used for fabricating metal-insulator-metal (M-I-M) devices that function as novel solid-state electron emitters. Nanoscale M-I-M devices deliver hot electrons to the metal/vacuum interface from within the solid. These hot electrons can stimulate nonthermal chemical reactions at the gas/surface interface or supplement the charge density of a plasma above the device. The chamber houses an electron analyzer for testing the devices in situ. Moreover a load-lock permits easy introduction of samples and transference to an adjoining ultrahigh vacuum (UHV) chamber so that more detailed surface analyses can be performed.

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Document Details

Document Type
Technical Report
Publication Date
Jun 28, 2002
Accession Number
ADA405890

Entities

People

  • Dennis C. Jacobs

Organizations

  • University of Notre Dame

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Accelerated Testing
  • Air Force
  • Analyzers
  • Chemistry
  • Current Density
  • Dielectrics
  • Electron Emission
  • Electrons
  • Emission
  • Fabrication
  • Films
  • Hypersonic Vehicles
  • Materials
  • Photoexcitation
  • Semiconductors
  • Thin Films
  • Vehicles

Fields of Study

  • Physics

Readers

  • Pulsed Power and Plasma Physics.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene