Request for Critical Equipment to Pursue Semiconductor Research at Virginia Microelectronics Center (VMC)
Abstract
An assortment of instruments to support our on going research was proposed for acquisition and the proposal was approved. They consisted of a Tektronix TDS 800 Sampling Scope with one optical head (80C03) and two electrical heads for dual channel operation (SOEO1), a Keithley model 4200 DC parameter Analyzer, a Westbond wire bonder, which is capable of wedge and bond bonding with piezoelectric motion controls, and design and manufacturing of a custom deposition chamber which will utilize the gas delivery and exhaust components of our existing MOCVD system. Even though the MOCVD deposition system design was submitted, and finds committed, to McAllister Technical Services of Coeur d'Alene, Idaho well in time for the project to be completed within one year after awarding of this grant, the manufacturing has not yet been completed. This is a very reputed machine shop, one that many scientists go to for quality work. We expect the delivery in a few months, but no set date is being provided yet. Only a portion, see the attached budget details, of the approximately $50,000 is being charged against this grant.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 01, 2002
- Accession Number
- ADA406406
Entities
People
- Hadis H. Morkoç̌
Organizations
- Virginia Commonwealth University