Innovative, High-Throughput, Large-Area, Versatile Nanoimprint Tools

Abstract

Nanonex is successfully finishing the SBIR Phase-I project and has developed a unique nanoimprint tool, Voyager-I. The tool offers unprecedented fast operation (< 60 sec per wafer) and excellent nanostructure uniformity over large area (> 4"). Furthermore, Voyager is well suited for precision alignment.

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Document Details

Document Type
Technical Report
Publication Date
Sep 18, 2002
Accession Number
ADA406443

Entities

People

  • Larry Koecher
  • Linshu Kong
  • Stephen Y. Cho

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Abstracts
  • Army Aviation
  • Classification
  • Contracts
  • Corporations
  • Information Operations
  • Manufacturing
  • Monitoring
  • Nanostructures
  • New Jersey
  • Precision
  • Security
  • Throughput
  • User Friendly

Readers

  • Computational Fluid Dynamics (CFD)
  • Nanofabrication and Microfabrication.
  • Systems Analysis and Design

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene