Micromachines for Microchips: Bringing the AFM up to Speed

Abstract

This Final Phase II SBIR report, developed under contract for topic number DARPA SB992-039, outlines improvements made to the atomic force microscope (AFM) in order to increase its imaging speed 10 to 100 times during standard operation. Faster imaging will allow the AFM to be used in high throughput military and microelectronic manufacturing applications. The developments made under this grant have been commercialized. These products are manufactured and sold in an agreement with Digital Instruments/Veeco. This report outlines the technical achievements made during the entire grant period.

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Document Details

Document Type
Technical Report
Publication Date
Sep 30, 2002
Accession Number
ADA407019

Entities

People

  • Stephen C. Minne

Tags

Communities of Interest

  • Advanced Electronics
  • Weapons Technologies

DTIC Thesaurus Topics

  • Circuits
  • Closed Loop Systems
  • Contracts
  • Control Systems
  • Detection
  • Detectors
  • Diagrams
  • Dielectric Polymers
  • Electronics
  • Frequency
  • High Resolution
  • Manufacturing
  • Microscopes
  • Microscopy
  • Resonance
  • Resonant Frequency
  • Standards

Fields of Study

  • Engineering

Readers

  • Integrated Circuit Design and Technology.
  • Nanoscale Plasmonic Nanotechnology
  • Technical Research and Report Writing.

Technology Areas

  • Microelectronics