Efficient Computational Prototyping of Mixed Technology Microfluidic Components and Systems
Abstract
Fast and efficient Computer Aided Design (CAD) tools for microfluidic components and systems were developed in this effort. Innovative numerical methods and algorithms for mixed-technology simulation of microfluidic devices and systems are described. Algorithms and techniques for coupled circuit/device modeling of microfluidic systems are presented. Test structures and devices were fabricated, and measurements taken to enable the computational prototyping of microfluidics and Micro-Electro Mechanical Systems (MEMS).
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 01, 2002
- Accession Number
- ADA407301
Entities
People
- Chang Liu
- George E. Kamiadakis
- Jacob White
- Kartikeya Mayaram
- Narayan R. Aluru
Organizations
- University of Illinois Urbana–Champaign