Mikrosystemtechnische Realisierung von Induktivitaeten (Microsystem-Technical Realization of Inductances)
Abstract
The dissertation discusses a completely new concept for the realization of specific inductance construction forms, with which, in parallel construction, one might work on a multitude of coils integrated into processing usage. Firstly, the author sets out his principles for production and characterization; secondly, he describes the usage process in detail, so as to provide examples for his empirical research. The next and largest chapter focuses on the deformation of the microstructures, including the area metalization, the photolithographic manufacture of galvanic forms, the Excimer laser-photolithography, the deformation of the track run, and dielectric passivation. The last chapter involves electric characterization.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 01, 2001
- Accession Number
- ADA407983
Entities
People
- Florian Wiest