PolyMEMS Actuator: A Polymer-Based Microelectromechanical (MEMS) Actuator with Macroscopic Action

Abstract

A polymer-based MEMS actuator, consisting of small unit cells in a macroscopic array, was developed and demonstrated. Models were developed which predicted the performance, and actuators were fabricated which matched the theoretical predictions. Deformation due to imperfect assembly resulted in imperfect performance. Further work is required to develop a reliable assembly process. Numerous polymer-based fabrication procedures were developed. Many of them borrow from either silicon or flexible printed circuit manufacturing, but modifications were necessary in order to adapt the processes to MEMS. The actuator is very efficient and uses very little power, making it suitable for autonomous applications such as robots.

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Document Details

Document Type
Technical Report
Publication Date
Sep 01, 2002
Accession Number
ADA408325

Entities

People

  • Robert Horning

Organizations

  • Honeywell International, Inc.

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Actuators
  • Air Force Research Laboratories
  • Assembly
  • Capacitors
  • Chemistry
  • Circuits
  • Dielectric Permittivity
  • Dielectrics
  • Fabrication
  • Failure Mode And Effect Analysis
  • Flexible Electronics
  • Geometry
  • Manufacturing
  • Materials Processing
  • Materials Science
  • Printed Circuits
  • Two Dimensional

Readers

  • Computational Modeling and Simulation
  • Integrated Circuit Design and Technology.
  • Robotics and Automation.

Technology Areas

  • AI & ML
  • AI & ML - Bayesian Inference
  • Autonomy
  • Microelectronics
  • Microelectronics - Microelectromechanical Systems