Epitaxial Liftoff for Fully Single Crystal Ferroelectric Thin Films
Abstract
High-frequency signal transmission demands in RF and microwave systems, such as electronic phased-array radar and scanning antennas, call for innovative approaches in materials technology. Outstanding issues in such systems are the fabrication of low-loss, highly tunable capacitive elements made of thin-film ferroelecri cs. This program used a new epitaxial liftoff technique developed at Columbia University to reduce high-quality, single-crystal films of ferroelectrics such as strontium titanate (ST), potassium tantalate, KTaO3 and potassium tantalate niobate (KTN) for use in microwave devices.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 01, 2002
- Accession Number
- ADA408609
Entities
People
- Eric Cross
- Hassaram Bakhru
- M. Levy
- Richard M. Osgood, Jr.
Organizations
- Columbia University