A Focused-Ion Beam (FIB) Nano-Fabrication and Characterization Facility

Abstract

This has been a most successful% project. The FIB has been purchased, installed and is now the most productive instrument in the Microscopy Center at Lehigh. Substantial research has been accomplished by the group of the principal investigator, but much research has been done by many other groups as well. Much of the work has involved the preparation of samples for examination in the transmission electron microscope (TEM) and scanning electron microscope (SEM), but - as anticipated in the proposal - several experiments have already used the FIB for novel methods of nanofabrication of devices.

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Document Details

Document Type
Technical Report
Publication Date
Nov 22, 2002
Accession Number
ADA408750

Entities

People

  • M. P. Harmer

Organizations

  • Lehigh University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Chemistry
  • Compound Semiconductors
  • Electron Microscopes
  • Electron Microscopy
  • Fabrication
  • Grain Boundaries
  • Ion Beams
  • Ions
  • Liquid Phases
  • Materials
  • Materials Science
  • Microscopes
  • Microscopy
  • Military Research
  • Photonic Crystals
  • Scanning Electron Microscopes

Readers

  • Nanoscale Plasmonic Nanotechnology
  • Research Science/Academic Research

Technology Areas

  • Microelectronics