New Techniques for Heterogeneous Integration for Sensing Systems
Abstract
The program's objective was to develop design and fabrication techniques for integrated optical/microwave RF systems and mid-IR optical waveguide components. Research in the areas of specific integrated optical systems and has yielded the development of the crystal ion slicing (CIS) technique for single-crystal LiNbO3 films for integrated photonics applications. We have also demonstrated second harmonic generation in these lithium niobate films, direct bonding of metal oxides films onto semiconductor substrates, and a new capability in the beam propagation method simulation of integrated photonic devices.
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 11, 2002
- Accession Number
- ADA408833
Entities
People
- Richard M. Osgood, Jr.
Organizations
- Columbia University