Acoustic Sensing with Capacitive Micromachined Membranes and Radio Frequency Detection

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Document Details

Document Type
Technical Report
Publication Date
Oct 01, 2001
Accession Number
ADA409144

Entities

People

  • A. S. Ergun
  • Butrus T. Khuri-yakub
  • Sean T. Hansen

Organizations

  • Stanford University

Tags

Communities of Interest

  • Sensors

DTIC Thesaurus Topics

  • Acoustic Detectors
  • Acoustic Signals
  • Bandwidth
  • Barometric Pressure
  • Capacitance
  • Detection
  • Detectors
  • Frequency
  • Frequency Response
  • Geometry
  • Measurement
  • Microphones
  • Radio Frequency
  • Resonant Frequency
  • Sensitivity
  • Transducers
  • Transmission Lines