Laser Enhanced System for Ultra-Fine Microstructure Formation
Abstract
During the past ten years, DOD sponsors over 35 research programs, which Dr. Chen served or has been serving as a principal investigator. All of them are focused on one area - "Optical Interconnects" which is directly related to "Optical Materials (4)", "Polymeric Materials (11)" and "Optoelectronic Computer Networking (13)" of the BMDO/DURIP solicitation. The major thrusts for the existing BMDO program are to generate polymer-based true time delay (TTD) module and to build a system demonstration for phased array antenna usmg BMDO-sponsored polymer-based active and passive photonic devices. High-speed polymer-based EO modulator arrays and polymer-based optical true-time delay modules have been built through the existing programs involving UT Austin (Chen), USC (Steier), UCLA (Fetterman) and Univ. of Washington (Dalton). These devices will be implemented onto a real phased array antenna system driving by polymer-based optoelectronic components. At the UT Microelectronics Research Center we maintain all almost needed fabrication facilities to realize the proposed devices. The equipment required to fulfill the committed task constitutes a "Laser Enhanced End Point Detection Plasma Etching System" through which the fine features of the devices can be fabricated. In 2000, we received financial support from DOD's funding agency, MDA, to acquire a Plasmalab 80 Plus laser enhanced end point detection etch tool from Oxford Instrument Corporation to serve the purposes described above. This system exhibits full laser enhanced end point detection with the accuracy better than + 0.1 um. Several DOD optical interconnects project have been benefited through the use of this laser, which has been use to fabricate various optoelectronic devices.
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 30, 2002
- Accession Number
- ADA410048
Entities
People
- Ray Chen
Organizations
- University of Texas at Austin