Development of MOEMS and Smart Systems Based on Transparent Metals

Abstract

This final interim report includes a statement of the problem studied, a summary of the most important results obtained during the development of the work and in the last four months, after the realization and the chracterization of the designed MOEMS prototypes. A detailed description of the etching procedures techniques at the laboratories of CNM, Spain is reported together with the simulations and the experimental measures made at the laboratories of AMSAM-RD-WS-ST, Huntsville AL, USA. A theoretical models of the final transducer is considered thus showing a very high optical sensitivity with respect to the displacement of the realized micro-suspended plates, where the PBG structures will be deposited in the next future.

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Document Details

Document Type
Technical Report
Publication Date
Oct 01, 2002
Accession Number
ADA411208

Entities

People

  • Salvatore Baglio

Organizations

  • University of Catania

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Abstracts
  • Actuators
  • Air Gaps
  • Buildings And Structures
  • Displacement
  • Materials
  • Mechanical Properties
  • Microelectronics
  • Models
  • Optical Properties
  • Prototypes
  • Residual Stress
  • Robots
  • Sensitivity
  • Simulations
  • Standards
  • Transducers

Readers

  • Integrated Circuit Design and Technology.
  • Systems Analysis and Design
  • Thin Film Deposition Science.