Acquisition of a High-Resolution Field Emission Electron Microscope for Nanoscale Materials Research and Development
Abstract
Funds are requested for the purchase of a quantitative field emission gun (FEG) scanning electron microscope (SEM) at the University of Virginia (UVa). This quantitative microscope will contain a 25 kV Schottky FEG, energy dispersive x-ray spectrometer (EDS), in-situ nano-lithography system, chemical mapping and orientation imaging and strain analysis capabilities. The instrument will allow quantitative imaging and compositional analyses to be performed on all types of materials with high spatial resolution at low accelerating voltages (< 2.5 nm at 1 keV, for example), and it is essential for many current materials research programs within the School of Engineering and Applied Science (SEAS) at UVa. The increased resolution that a FEG SEM delivers will be a centerpiece for future research and development and characterization of nanoscale materials ranging from metals, electronic, and biological materials within SEAS and the College of Arts and Sciences, as well as for nearby academic institutions and industries. The new microscope is required to replace the existing SEMs, which are seriously outdated. It is clear that the new state-of-the-art SEM is required as a starting base in order to develop new materials in the nanoscale class that the DoD and the rest of the research community are pushing towards. The current SEMs have effectively served UVa in an efficient manner, providing over 15 years of continuous use for materials research. UVa has faculty and staff with sufficient expertise in SEM techniques to ensure that the new instrument is utilized for the highest quality materials research and that it is maintained at an optimum level of performance. The current track record that UVa has with other analytical instruments in the past are a strong testament to this infrastructure and we are confident this will continue in the future.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 01, 2002
- Accession Number
- ADA411490
Entities
People
- James M. Fitzgerald
Organizations
- University of Virginia