Microelectromechanical (MEMS)-Based Data Storage

Abstract

This project developed and demonstrated design and fabrication technologies required to enable mass production of MEMS micromovers and electrostatic motors required to actuate these structures, including suspension systems of unprecedented high aspect ration by Hewlett Packard. Single and multiple level electrical interconnect fabrication techniques were developed and refined by Cornell University. A technique to fabricate large arrays of field emission tips was developed by U.C. Davis.

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Document Details

Document Type
Technical Report
Publication Date
Feb 01, 2003
Accession Number
ADA411620

Entities

People

  • Charles E. Hunt
  • Norman C. Tien
  • Peter Hartwell
  • Uija Yoon

Organizations

  • Hp

Tags

DTIC Thesaurus Topics

  • Assembly
  • Brushless Dc Motors
  • Ceramic Materials
  • Chemical Synthesis
  • Chemical Vapor Deposition
  • Chemistry
  • Compound Semiconductors
  • Data Storage Systems
  • Electronics Laboratories
  • Fabrication
  • Field Emission
  • Manufacturing
  • Measurement
  • Microelectromechanical Systems
  • Resonant Frequency
  • Semiconductors
  • Test And Evaluation

Readers

  • Integrated Circuit Design and Technology.
  • Research Science/Academic Research
  • Robotics and Automation.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems