Nanocomposite Diamond and Nitride Films on Structural Materials
Abstract
Three different types of plasma deposition systems were constructed for film syntheses. 1) A laser absorption wave deposition (LAWD) was constructed to deposit diamond and diamond like films and nitride based films on steel, aluminum and other substrates from flowing methane/hydrogen mixtures. A pulsed infraredYAG laser was used to create simultaneously two plasmas-from the flowing gas mixture and from the substrate onto which the film was to be deposited. 2) An electron cyclotron resonance microwave plasma enhanced chemical vapor deposition system was designed and used to grow diamond and diamond-like films on structural materials such as Fe-based alloys (316 stainless steel). Films were grown at low temperatures (400 C and below) from methane/hydrogen mixtures, without use of diamond seeding and without use of a template layer between the Fe-based substrate and the diamond-like film. 3) A pulsed UV krypton-ion laser deposition system was constructed for growth of structured oxide films. ZnO films were grown on various substrates. A method for p-type doping of ZnO films was developed for use in creating p-n junctions for electronic device applications.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 28, 2001
- Accession Number
- ADA412706
Entities
People
- Henry W. White
Organizations
- Curators of the University of Missouri