The Effects of Ionizing Radiation on Microelectromechanical Systems (MEMS) Actuators: Electrostatic, Electrothermal, and Residual Stress

Abstract

The effects of ionizing radiation on the operation of polysilicon mmicroelectromechanical system (MEMS) electrostatic actuators, electrothermal actuators, and residual stress cantilevers were examined. Pre-irradiation, in-situ, and post-irradiation measurements were taken for the electrosatic and electrothermal actuators. The residual stress cantilevers were characterized before and after irradiation. All devices were irradiated to a total ionizing does of 1 megarad(Si) using both the Air Force Research Laboratory's low energy X-ray source and Co-60 gamma source.

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Document Details

Document Type
Technical Report
Publication Date
Mar 25, 2003
Accession Number
ADA415708

Entities

People

  • Jared R. Caffey

Organizations

  • Air Force Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies
  • Space
  • Weapons Technologies

DTIC Thesaurus Topics

  • Air Force
  • Ceramic Materials
  • Computer Programs
  • Electrical Properties
  • Electromagnetic Fields
  • Energy Bands
  • Gamma Rays
  • Geosynchronous Orbits
  • Ionizing Radiation
  • Jet Propulsion
  • Measurement
  • Microelectromechanical Systems
  • Micromachining
  • Military Research
  • Nuclear Reactors
  • Semiconductors
  • Spacecraft

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Nuclear and Radiation Engineering.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems