Soft X-Ray Microscopy and Metrology
Abstract
This AFOSR grant has been used to support graduate students in the areas of coherence and microscopy at soft x-ray wavelengths. Techniques were developed for characterizing the spatial coherence of undulator radiation, table top soft x-ray lasers, and high harmonic generation of femtosecond pulses at short wavelengths, all in the 1-50 nm wavelength regime. With varying additional attributes, all three sources provide radiation exhibiting a high degree of spatial coherence. In the area of high resolution soft x-ray microscopy, a spatial resolution of 23 nanometers has been demonstrated using new, best-in-the-world, Fresnel zone plate lenses, special nanometer test patterns, and bending magnet radiation in the 1-4 nm region. State-of-the-art images have been obtained of magnetic recording materials with sub-5O nm domains, cryo-prepared biological samples showing detailed views of cells and sub-cellular structures, and modern nanochip interconnects. A new text has been published: D. Attwood, "Soft X-rays and Extreme Ultraviolet Radiation: Principles and Applications" (Cambridge Univ. Press, UK 2000). Several reprints are attached: "Soft X-ray Microscopy to 25 nm with Applications to Biology and Magnetic Materials" (NIM A, v467-468, p841-844, 2001); "Spatial Coherence and Properties of Undulator Radiation Based on Thompson-Wolf Two-pinhole Measurement" (NIM A, v467-468, p913-916, 2001); "Spatial Coherence Characterization of Undulator Radiation" (Optics Communications, v182, p25-34, 2000); "Achievement of Essentially Full Spatial Coherence in a High-Average-Power Soft X-ray Laser" (Phys. Rev. A, v63 n3, p33802-1 to 33802-5, 2001); "Nanofabrication and Diffractive Optics for High-Resolution X-ray Applications" (J. Vac. Sci. Technol. B, v18 n6, p2970-2975, Nov-Dec 2000); "High-Resolution Soft X-ray Microscopy" (Proc. of SPIE Reprint, v4146, p171-175, 2000); "Experimental Analysis of High-Resolution Soft X-ray Microscopy" (Proc. of SPIE Reprint, v4499, p134-141, 2001).7
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 01, 2001
- Accession Number
- ADA416265
Entities
People
- David Attwood
Organizations
- University of California, Berkeley