Parallel, Ultrafast Sub-100 Nanometer Dip-Pen Nanolithography
Abstract
We have developed new designs and fabrication techniques for arrayed (one dimensional and two dimensional) DPN probes in two categories, passive probes and active probes. We have successfully developed mechanical and electrical interfaces to commercial AFM machines and software. Arrayed DPN writing has been achieved. As a highlight, a set of ten different characters has been written using ten different pens in one single run. We also have significantly advanced the chemistry compatible with the DPN technique. We have demonstrated the patterning of organic molecules (e.g., self-assembled monolayers) biological molecules (protein, and DNA molecules) and inorganic materials (e.g., sol-gel, silicon, and magnetic nanoparticles). Potential applications of DPN have now been extended to the semiconductor industry (e.g., mask repair and patterning of semiconductor substrates and thin films with sub-100 nm resolution), as well as military and medical diagnostics (e.g., DNA and protein arrays). We also have developed efficient and high yield microfabrication processes for realizing 2D probe arrays with uniform and small tip radii. A method for detecting tip/substrate contact has been developed using electrical continuity. In summary, we have successfully completed proposed tasks outlined in the proposal. We plan to develop high- density 2D arrays DPN robes with efficient inking method.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 16, 2003
- Accession Number
- ADA416827
Entities
People
- Chad Mirkin
- Chang Liu
Organizations
- Northwestern University