A Proposal to Acquire a Micro Thermal Imaging Microscope
Abstract
We purchased an InfraScope II thermal imaging microscope from Quantum Focus Instruments Corporation. The machine was purchased within a month after receiving the DURIP funds, and was installed in the Micro and Nanotechnology Laboratory. The total cost of the QFI InfraScope II Infrared Imaging Microscope is $129,540 (charged to the core account) plus $23,373, charged to a match account provided by the Electrical and Computer Engineering Department of the University of Illinois. We have used the machine in a number of scientific research projects. The unique infrared microscopy capability provides capability to conduct temperature measurement on many micro devices, including: thermally active dip pen nanolithography (DPN) probes, Parylene surface micromachined fluid shear stress sensors, in situ Parylene thickness sensors, micro heaters for fluidics applications, and three dimensional hot wire anemometers. The measurement capability allows us to have accurate rate in short time, providing significant benefits for many DoD funded work. Results obtained using the microscope have been used to validate design concept and to confirm accuracy of numerical modeling. Results are published in 3 peer reviewed conference papers, 1 journal paper, and 2 journal paper submissions.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 25, 2003
- Accession Number
- ADA416903
Entities
People
- Chang Liu
Organizations
- University of Illinois Urbana–Champaign