Photon Processing in Microelectronics and Photonics

Abstract

This proceedings contains papers on the following topics: Laser processing, pulsed laser deposition, Surface and thin film treatments, Laser ablation, Laser-matter interaction, Machining and microstructuring, Microsystems and microdevices.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2002
Accession Number
ADA417733

Entities

People

  • Alberto Piqué
  • Frank Traeger
  • Koji Sugioka
  • Malcolm C. Gower
  • Richard F. Haglund Jr.

Organizations

  • SPIE

Tags

Communities of Interest

  • Advanced Electronics
  • Biomedical
  • Energy and Power Technologies
  • Ground and Sea Platforms

DTIC Thesaurus Topics

  • Chemical Synthesis
  • Chemistry
  • Frequency Combs
  • Laser Applications
  • Laser Beams
  • Laser Science
  • Lasers
  • Light (Electromagnetic Radiation)
  • Material Degradation Processes
  • Materials Laboratories
  • Materials Processing
  • Materials Science
  • Materials Testing
  • Optical Properties
  • Optics
  • Thermodynamics

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Optical Physics and Photonics.
  • Thin Film Deposition Science.

Technology Areas

  • Directed Energy
  • Directed Energy - Pulsed-Laser Deposition
  • Microelectronics
  • Microelectronics - Graphene