Direct Write Laser Lithography System
Abstract
The Heidelberg Instruments laser writer was purchased in July 2002, arrived in November 2002, and was fully operational after several months of optimization and hardware troubleshooting in April 2003. At present, this instrument is used for optical beam-writing of UV lithography masks, and will be employed in tandem with a recently purchased MA6/BA6 mask aligner for rapid prototyping in nanobiotechnology and nanophotonics research at Caltech. It is presently also used for direct-writing of microfluidic replication molding dies, and has enabled the demonstration of the first integrated elastomeric one-way microfluidic valve. It has been successfully applied towards the microfabrication of electrostatic contacts onto optical devices that are back-filled with liquid crystals and electro-optic polymers with the goal of constructing electrically tuneable optical devices.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 2002
- Accession Number
- ADA419981
Entities
People
- Axel Scherer
Organizations
- California Institute of Technology