Design and Characterization of MEMS Optical Microphone for Aeroacoustic Measurement

Abstract

This paper presents the design and characterization of an intensity modulated optical lever microphone. Optical microphones (OM) have an inherent immunity to environments hostile to electronics due to the spatial separation of the electronics and the acoustic field under test. Theoretical equations for the sensitivity, minimum detectable signal, and frequency response are presented. Physical phenomena responsible for limiting the microphone minimum detectable signal (MDS) are identified, and a model is developed for use with a laser diode as the light source. The characterization of the microphone indicates an overall sensitivity of 0.5 mV/Pa, a linear response up to 132dB ref. 20 uPa, and an overall noise floor of 70dB measured at 1kHz over a 1Hz bin.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2004
Accession Number
ADA421120

Entities

People

  • K. Kadirvel
  • L. Hunt
  • M. Sheplak
  • Rebekah T. Taylor
  • S. Horowitz

Organizations

  • University of Florida

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies
  • Sensors

DTIC Thesaurus Topics

  • Acoustic Fields
  • Acoustic Signals
  • Acoustic Waves
  • Amplifiers
  • Detection
  • Detectors
  • Electronics
  • Energy
  • Energy Transfer
  • Frequency
  • Frequency Response
  • Lasers
  • Light Sources
  • Measurement
  • Microphones
  • Radiation
  • Sensitivity

Fields of Study

  • Physics

Readers

  • Acoustics.
  • Image Processing and Computer Vision.

Technology Areas

  • Directed Energy
  • Directed Energy - Lasers
  • Microelectronics
  • Microelectronics - Microelectromechanical Systems